Technical Publications

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Source-Mask Optimization and MO Exposure Optics

Technical Paper

• Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source (PDF - 5127 kb)
• Micro-Optics for Photolithography - Key enabling technology for wafer-based manufacturing technology - 2016 (view online)
• Micro-Optics: Enabling Technology for Illumination Shaping in Optical Lithography - 2014 (PDF - 1344 kb)
• Lithographic process window optimization for mask aligner proximity lithography - 2014 (PDF - 1345 kb)
• Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks (PDF - 6.1 mb)
• Wafer-scale micro-optics fabrication - 2012 (PDF - 2104kb)
• Advanced Mask Aligner Lithography (AMALITH) - 2012 (PDF - 1136kb)

Talk

• Micro-Optics: Key Enabling Technology for Advanced Mask Aligner Lithography - EOS Annual Meeting 2010 (PDF - 2728kb)
• Einsatzmöglichkeiten mikrooptischer Komponenten für Mask Aligner Belichtungssysteme - MST Kongress 2011 (PDF - 690kb)
• Mask Aligner Process Enhancement by Spatial Filtering - Proc. SPIE 8170 (PDF - 397kb)
• Mask Aligner Process Enhancement by Spatial Filtering (PDF - 2230kb)
• Simulation Tools for Advanced Mask Aligner Lithography - Proc. SPIE 8167 (PDF - 995kb)
• Simulation Tools for Advanced Mask Aligner Lithography (AMALITH) (PDF - 1747kb)
• Modellierung und Simulation bei Mask Aligner Lithographie - Poster DGAO 2011 (PDF - 1587kb)
• Advanced mask aligner lithography: new illumination system - Optics Express 2010, Vol 18, N° 20 (PDF - 1500kb)
• Innovative Mask Aligner Lithography for MEMS and Packaging - Semicon Taiwan 2010 (PDF - 1900kb)

Presentation

• Advanced Mask Aligner Lithography (AMALITH) (PDF - 2808kb)
• MO Exposure Optics & Source-Mask Optimization (PDF - 1400kb)
• Half-tone proximity lithography - Proc. SPIE 7716 2010 (PDF - 1750kb)
• Optimization of illumination pupils and mask structures for proximity printing - Microelectron. Eng. (2009), doi:10.1016/j.mee.2009.10.038 (PDF - 530kb)
• Contact and proximity lithography using 193nm Excimer Laser in Mask Aligner - MNE, Vol 87, 936-939, ISSN 0167-9317 2010 (PDF - 330kb)
• Special on MO Exposure Optics - SUSS Report 2009 (PDF - 725kb)

Beam shaping and homogenizing

• Micro-Optics for Photolithography - Optik&Photonik 2/16) (PDF - 1289kb)
• Homogenisierung von Laserstrahlen - Photonik Vol. 3 (2006) (PDF - 554kb)
• MicroOptical System for Fluorescence Detection - Analytical Chem. 74 - 2002 (PDF -217 kb)
• Fluorescence Detection - Microfluidics, MicroOptics, JEMS Vol 10, No 4, 2001 (PDF 264 kb)
• Homogeneous LED-illumination using microlens arrays - SPIE 5942-20 (PDF -360 kb)
• Improvement of planar laser diagnostics by the application of a beam homogenizer (PDF -360 kb)
• Laser Beam Homogenizing: Limitations and Constraints - SPIE Glasgow 2008 (PDF - 2090 kb)
• Refractive Micro-optics for Multi-spot and Multi-line Generation - Proceedings of LPM2008 (PDF - 312 kb)
• Laser - Strahlformung als Schlüssel zum Erfolg - Laser Magazin 3/08 (PDF - 913 kb)
• Homogenous monochromatic irradiance fields generated by microlens arrays - Newrad 2008 (PDF - 84 kb)

Wafer Level Camera, Cameras, Imaging

• Natural optical design concepts for highly miniaturized camera systems - SPIE Vo. 3737 (PDF - 1764kb)
• Wafer-Level Micro-Optics: Trends in Manufacturing, Testing and Packaging - Proc. of SPIE Vol. 8169 81690C-1 (PDF - 2763kb)
• Technology Trends in the Manufacturing and Packaging of Wafer Level Cameras - ESTC Berlin 10 (PDF - 580kb)
• Technology Trends of Microlens Imprint Lithography and Wafer Level Cameras (WLC) - MOC 08 (PDF - 301kb)
• Ultra-Thin Camera - MOC'04 (PDF -600 kb)
• Flat Camera- German Patent DE 199 17 890 A1 (PDF -1105 kb)
• Halbleitertechnik für bessere Mobiltelefon-Kameras - Mikroproduktion 01/09 (PDF - 915 kb)
• Artifical compound eyes - Photonics West 2004 (PDF -1305 kb)
• Miniaturization of Imaging Systems - mstnews 2 - 2003 (PDF -257 kb)
• Miniaturized Imaging Systems - ME 67-68 2003 (PDF -856 kb)
• Novel Optics/Micro-Optics for Miniature Imaging Systems (PDF - 1498kb)
• Wafer Scale Manufacturing Processes In Optical Technologies For Illumination, World of Photonics, Panel, LASER '209, Munich, June 17, 2009 (PDF - 2896kb)

Other

• Novel Micro-Optics Solutions Through Monolithic Integration of Microlenses and Prisms (2022) (PDF - (1423kb)
• Talbot Lithography as an Alternative for Contact Lithography for Submicron Features (2014) (PDF - 706kb)
• Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks (2014) (PDF - 1062kb)
• High numerical aperture silicon collimating lens for mid-infrared quantum cascade lasers manufactured using wafer-level techniques (2012) (PDF - 2993kb)
• Full wafer microlens replication by UV imprint lithography - Microelectronic Engineering 87 (2010) 1074–1076 (available online)
• Micro-Optics: From High-End to Mass-Market - Optik & Photonik No 4, (2009) (PDF - 324kb)
• On the chromatic aberration of microlenses - OPTICS EXPRESS Vol. 14, No. 11 (2006) (PDF - 202kb)
• Moire Magnifiers - Opt Eng 37 (11) 3007-3014 (1998) (PDF -1095 kb)
• Focal-point shaping of microlenses by amplitude or phase masks - MOC'04 (PDF -588 kb)
• Talbot imaging with microlens arrays (PDF - 1500 kb)
• Fractional Talbot effect for periodic microlens arrays (PDF - 250 kb)
• Lab-on-Chip - Microelectronic Engineering 67-68 2003 (PDF -298 kb)
• Microlens Arrays for Sensors and Microsystems - Pure Appl Opt 6 (1997) (PDF -1653 kb)
• SOI_based optical MEMS - JSTQE Optical Mems - Feb 2002 (PDF -695 kb)
• Automated optimization of non-imaging optics for luminaires - SPIE 5942-20 (PDF -560 kb)
• Kommerzialisierung von Mikro-Optik - DGaO-Proceedings 2006 (PDF - 67 kb)
• High-volume Optics Fabrication: New technologies enable precise and cost-effective wafer-level optics - Laser Focus World (PDF - 90 kb)
• Micro-Optics Fabrication and Applications - ODF'08 Taipei (PDF - 161 kb)
• Illumination of DLP® with Laser Light Sources, 4th International Symposium on Emerging and Industrial DLP® Applications, Frankfurt, Germany , Nov 12, 2009 (PDF - 4335 kb)