TESTING AND INSPECTION

SUSS MicroOptics profits from more than 15 years experience in optical testing that our key scientists have gained during their work at University of Erlangen, University of Neuchâtel, University of Arizona and Wyko.

SUSS MicroOptics uses the following inspection tools to control the outstanding quality of our products:

• Foothill Instruments KT-22, Film Thickness Metrology
• Tencor P-10, P-15, Surface Profilers
• Twyman-Green Interferometer [Prof. Schwider]
• Mach-Zehnder Interferometer [Prof. Schwider]
• SUSS MicroTec, DSM-8 Double Side Alignment Test
• Wyko NT-3300, Automatic Surface Profiler
• Microscopes (Leica, Reichert, Zeiss)
• Fizeau Interferometer, Wafer Inspection (at supplier)
• Array Testing for Defects (Pattern Recognition)
• Goniometer

Please download our Technical Information Sheet 05 providing more details on Testing and Inspection.