Key features

• Refractive and diffractive microlenses
  
• Bulk material                 Fused Silica, Silicon, Pyrex
  
• Wavelength range        DUV - IR
  
• Maximum array size     Ø180 mm, 120 mm x 120 mm
  
• Lens size                      10 μm – 2 mm
  
• Lens profiles                 Plano-convex, bi-convex, spheres, aspheres

Additional features      

• Double sided lens arrays with precise front-to-back alignment
  
• stop arrays
  
• pupils
  
• pin-holes
  
• alignment marks
  
• self-aligning structures
  
• Wafer-Level Packaging
  
• AR-coating and dicing
  

A short introduction on refractive microlens arrays

Refractive microlenses are an interesting alternative for all applications where miniaturization and reduction of alignment and packaging costs are necessary. A refractive microlens refracts the incident light according to Snell’s law, similar as large-scale glass lenses do.

Refractive microlenses are manufactured in Fused Silica or Silicon using standard semiconductor technologies like photolithography, resist processing and reactive ion etching. These wafer-based manufacturing technologies allow a very accurate shaping of the lens profile and a precise positioning of the lenses within an array. SUSS MicroOptics is manufacturing in 200 mm (8’’) wafer technology in cleanroom environment.

If you want to find out more information on our microoptics, please have a look at our technical datasheet "SMO TechInfo 08 - Introduction to Microlenses" and our microlens catalog(pdf - 2 mb).
For more information on our refractive and diffractive microlens arrays, please contact us.

You find a large choice of refractive microlens arrays in our online shop. If you do not find what you are looking for, please contact us for customized arrays.

Please visit also our Download Area where you will find additional informations as well as technical publications.