Download area
Microlens Catalog
- Our current microlens catalog (pdf - 2 mb)
Tech Briefs - A short introduction to our capabilities
- Beam Homogenizing Tech Brief (pdf -51 kb)
- UV Light Source Illumination Tech Brief (pdf -54 kb)
- Diffuser Tech Brief (pdf -97 kb)
- Fiber Coupling Tech Brief (pdf -155 kb)
- Shack-Hartmann Tech Brief (pdf -49 kb)
- Diffractive Optical Elements (DOE) Tech Brief (pdf -377 kb)
- Large Field Illumination Tech Brief (pdf -159 kb)
- Wafer Level Camera Tech Brief (pdf -105 kb)
- Laser Diode Solutions Tech Brief (pdf -75 kb)
Technical Datasheets
- SMO TechInfo 04 - Useful Equations for Microlenses (pdf -187 kb)
- SMO TechInfo 05 - Testing and Inspection (pdf -148 kb)
- SMO TechInfo 06 - Products and Services (pdf -192 kb)
- SMO TechInfo 07 - Fiber Coupling (pdf -226 kb)
- SMO TechInfo 08 - Introduction to Microlenses (pdf -203 kb)
- SMO TechInfo 09 - Optical Properties (pdf -343 kb)
- SMO TechInfo 10 - Beam Homogenizer (pdf -172 kb)
- SMO TechInfo 11 - Shack-Hartmann (pdf -270 kb)
- SMO TechInfo 12 - Mounts and Holders (pdf -900 kb)
- SMO TechInfo 14 - Flat-Top-Generator: square, line spot (pdf -900 kb)
- SMO TechInfo 15 - Laser Sheet homogenizer for diagnostics(pdf -900 kb)
- SMO TechInfo 16 - Rotating diffuser (pdf -91 kb)
- Fill Factor Enhancement for CMOS-CCD-Sensor (pdf - 950kb)
- Datasheet Source-Mask Optimzation (pdf - 4 mb)
- Datasheet MO Exposure Optics (pdf - 2.1 mb)
Publications and Presentations
Source-Mask Optimization & MO Exposure Optics
- Talk: Micro-Optics: Key Enabling Technology for Advanced Mask Aligner Lithography - EOS Annual Meeting 2010 (pdf - 2728kb)
- Einsatzmöglichkeiten mikrooptischer Komponenten für Mask Aligner Belichtungssysteme - MST Kongress 2011 (pdf - 690kb)
- Mask Aligner Process Enhancement by Spatial Filtering - Proc. SPIE 8170 (pdf - 397kb)
- Talk: Mask Aligner Process Enhancement by Spatial Filtering (pdf - 2230kb)
- Simulation Tools for Advanced Mask Aligner Lithography - Proc. SPIE 8167 (pdf - 995kb)
- Talk: Simulation Tools for Advanced Mask Aligner Lithography (AMALITH) (pdf - 1747kb)
- Modellierung und Simulation bei Mask Aligner Lithographie - Poster DGAO 2011 (pdf - 1587kb)
- Advanced mask aligner lithography: new illumination system - Optics Express 2010, Vol 18, N° 20 (pdf - 1500kb)
- Innovative Mask Aligner Lithography for MEMS and Packaging - Semicon Taiwan 2010 (pdf - 1900kb)
- Presentation MO Exposure Optics & Source-Mask Optimization (pdf - 1400kb)
- Half-tone proximity lithography - Proc. SPIE 7716 2010 (pdf - 1750kb)
- Optimization of illumination pupils and mask structures for proximity printing - Microelectron. Eng. (2009), doi:10.1016/j.mee.2009.10.038 (pdf - 530kb)
- Contact and proximity lithography using 193nm Excimer Laser in Mask Aligner - MNE, Vol 87, 936-939, ISSN 0167-9317 2010 (pdf - 330kb)
- Special on MO Exposure Optics - SUSS Report 2009 (pdf - 725kb)
Beam shaping & homogenizing
- Homogenisierung von Laserstrahlen - Photonik Vol. 3 (2006) (pdf - 554kb)
- MicroOptical System for Fluorescence Detection - Analytical Chem. 74 - 2002 (pdf -217 kb)
- Fluorescence Detection - Microfluidics, MicroOptics, JEMS Vol 10, No 4, 2001 (pdf- 264 kb)
- Homogeneous LED-illumination using microlens arrays - SPIE 5942-20 (pdf -360 kb)
- Improvement of planar laser diagnostics by the application of a beam homogenizer (pdf -360 kb)
- Laser Beam Homogenizing: Limitations and Constraints - SPIE Glasgow 2008 (pdf - 2090 kb)
- Refractive Micro-optics for Multi-spot and Multi-line Generation - Proceedings of LPM2008 (pdf - 312 kb)
- Laser - Strahlformung als Schlüssel zum Erfolg - Laser Magazin 3/08 (pdf - 913 kb)
- Homogenous monochromatic irradiance fields generated by microlens arrays - Newrad 2008 (pdf - 84 kb)
Wafer Level Camera, Cameras, Imaging
- Natural optical design concepts for highly miniaturized camera systems - SPIE Vo. 3737 (pdf - 1764kb)
- Wafer-Level Micro-Optics: Trends in Manufacturing, Testing and Packaging - Proc. of SPIE Vol. 8169 81690C-1 (pdf - 2763kb)
- Technology Trends in the Manufacturing and Packaging of Wafer Level Cameras - ESTC Berlin 10 (pdf - 580kb)
- Technology Trends of Microlens Imprint Lithography and Wafer Level Cameras (WLC) - MOC 08 (pdf - 301kb)
- Ultra-Thin Camera - MOC'04 (pdf -600 kb)
- Flat Camera- German Patent DE 199 17 890 A1 (pdf -1105 kb)
- Halbleitertechnik für bessere Mobiltelefon-Kameras - Mikroproduktion 01/09 (pdf - 915 kb)
- Artifical compound eyes - Photonics West 2004 (pdf -1305 kb)
- Miniaturization of Imaging Systems - mstnews 2 - 2003 (pdf -257 kb)
- Miniaturized Imaging Systems - ME 67-68 2003 (pdf -856 kb)
- Novel Optics/Micro-Optics for Miniature Imaging Systems (pdf - 1498kb)
- Wafer Scale Manufacturing Processes In Optical Technologies For Illumination, World of Photonics, Panel, LASER '209, Munich, June 17, 2009 (pdf - 2896kb)
Other
- Full wafer microlens replication by UV imprint lithography - Microelectronic Engineering 87 (2010) 1074–1076 (available online)
- Micro-Optics: From High-End to Mass-Market - Optik & Photonik No 4, (2009) (pdf - 324kb)
- On the chromatic aberration of microlenses - OPTICS EXPRESS Vol. 14, No. 11 (2006) (pdf - 202kb)
- Moire Magnifiers - Opt Eng 37 (11) 3007-3014 (1998) (pdf -1095 kb)
- Focal-point shaping of microlenses by amplitude or phase masks - MOC'04 (pdf -588 kb)
- Talbot imaging with microlens arrays (pdf - 1500 kb)
- Fractional Talbot effect for periodic microlens arrays (pdf - 250 kb)
- Lab-on-Chip - Microelectronic Engineering 67-68 2003 (pdf -298 kb)
- Microlens Arrays for Sensors and Microsystems - Pure Appl Opt 6 (1997) (pdf -1653 kb)
- SOI_based optical MEMS - JSTQE Optical Mems - Feb 2002 (pdf -695 kb)
- Automated optimization of non-imaging optics for luminaires - SPIE 5942-20 (pdf -560 kb)
- Kommerzialisierung von Mikro-Optik - DGaO-Proceedings 2006 (pdf - 67 kb)
- High-volume Optics Fabrication: New technologies enable precise and cost-effective wafer-level optics - Laser Focus World (pdf - 90 kb)
- Micro-Optics Fabrication and Applications - ODF'08 Taipei (pdf - 161 kb)
Illumination of DLP® with Laser Light Sources, 4th International Symposium on Emerging and Industrial DLP® Applications,
