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Short Introduction to Beam Homogenizing


solutions: wafer level packaging
solutions: refractive microlenses
design: fiber coupler
Matterhorn
Fly’s eye condensers are the appropriate mean to homogenize the light emitting from a small light bulb or LED, and to efficiently illuminate extended object fields in the object plane of the microscope.

Microlens arrays in fused silica are used for beam homogenizing of high power laser beams from 193nm to the IR. Typically two microlens arrays and a Fourier lens are required to achieve uniform intensity profiles.

The appropriate solution depends very much on the wavelength, coherence properties, beam profile, beam divergence, ellipticity and polarization of the laser.

SUSS MicroOptics provides fly's eye condensers, cylindrical, crossed-cylindrical and square-type microlens arrays in fused silica and silica (IR) for beam homogenizing.

Recently we have developed the high quality Fly’s Eye condenser Flat-Top 5 with a high uniformity and an efficiency > 98 %. This Fly's Eye condenser is used for the creation of highly uniform flat-tops and is also deployed in our new generation of Square-Flat-Top-Generators, Spot-Generators and Line-Flat-Top-Generators.

Square Flat-TopPoint Matrix Flat-Top (Spots)Single Line Flat-Top

Examples for square, point matrix (spots) & single line flat-tops

More information on beam homogenizing is provided in our Technical Information Sheet #10.

Examples and design files are provided in Technical Information Sheet #10 - Examples.

Please contact our expert Jürgen Rieck (+41-32-720-5428, rieck@suss.ch ) to get a detailed offer for beam homogenizing of your laser.

 
SUSS MicroOptics is part of SUSS MicroTec group, a world's leading manufacturer of equipment for semiconductors and microtechnology.

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